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SPIE Proceedings [SPIE 2nd international Symposium on Advanced Optical Manufacturing and Testing Technologies - Xian, China (Wednesday 2 November 2005)] 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies - Hysteresis compensation for piezoelectric actuators in single-point diamond turning
Wang, Haifeng, Yang, Li, Wen, Shangming, Hu, Dejin, Wan, Daping, Chen, Yaolong, Kley, Ernst-Bernhard, Liu, HongbinVolume:
6149
Year:
2005
Language:
english
DOI:
10.1117/12.674322
File:
PDF, 504 KB
english, 2005