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SPIE Proceedings [SPIE SPIE Optics + Photonics - San Diego, California, USA (Sunday 13 August 2006)] Interferometry XIII: Applications - Computer aided alignment using Zernike coefficients

Yang, Ho-Soon, Kim, Sung-Hee, Lee, Yun-Woo, Song, Jae-Bong, Rhee, Hyug-Gyo, Lee, Hoi-Yoon, Lee, Jae-Hyeob, Lee, In-Won, Kim, Sug-Whan
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Volume:
6293
Year:
2006
Language:
english
DOI:
10.1117/12.678647
File:
PDF, 365 KB
english, 2006
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