SPIE Proceedings [SPIE MOEMS-MEMS 2007 Micro and...

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SPIE Proceedings [SPIE MOEMS-MEMS 2007 Micro and Nanofabrication - San Jose, California, United States (Saturday 20 January 2007)] Microfluidics, BioMEMS, and Medical Microsystems V - Set-up of a biological monitoring module realized in LTCC technology

Smetana, Walter, Balluch, Bruno, Stangl, Günther, Gaubitzer, Erwin, Edetsberger, Michael, Köhler, Gottfried
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Volume:
6465
Year:
2007
Language:
english
DOI:
10.1117/12.701940
File:
PDF, 1.95 MB
english, 2007
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