SPIE Proceedings [SPIE Microtechnologies for the New Millennium - Maspalomas, Gran Canaria, Spain (Wednesday 2 May 2007)] Smart Sensors, Actuators, and MEMS III - Physical modeling of a highly sensitive linear MOS sensor for 2D detection of magnetic fields
Abou-Elnour, Ali, Becker, Thomas, Cané, Carles, Abo-Elnor, Ossama, Mohamed, Essam Y., Barker, N. Scott, Ibrahim, M. MarzoukVolume:
6589
Year:
2007
Language:
english
DOI:
10.1117/12.722107
File:
PDF, 258 KB
english, 2007