SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 22 February 2009)] Alternative Lithographic Technologies - Extreme ultraviolet holographic lithography with a table-top laser
Isoyan, A., Schellenberg, Frank M., La Fontaine, Bruno M., Jiang, F., Cheng, Y.-C., Wachulak, P., Urbanski, L., Rocca, J., Menoni, C., Marconi, M., Cerrina, F.Volume:
7271
Year:
2009
Language:
english
DOI:
10.1117/12.814678
File:
PDF, 1.52 MB
english, 2009