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SPIE Proceedings [SPIE 1985 Microlithography Conferences - Santa Clara (Monday 11 March 1985)] Electron-Beam, X-Ray, and Ion-Beam Techniques for Submicrometer Lithographies IV - Current Status Of Ion Projection Lithography
Stengl, G., Loschner, H., Maurer, W., Wolf, P., Blais, Phillip D.Volume:
537
Year:
1985
Language:
english
DOI:
10.1117/12.947494
File:
PDF, 17.70 MB
english, 1985