![](/img/cover-not-exists.png)
[ECS 209th ECS Meeting - Denver, Colorado (May 7-May 12, 2006)] ECS Transactions - Fabrication of Si Structures with Vertical Side-walls using Single Long Plasma Etch
Agarwal, Rahul, Samson, Scott, Bhansali, S.Volume:
2
Year:
2007
Language:
english
DOI:
10.1149/1.2409014
File:
PDF, 865 KB
english, 2007