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Effects of Ethylene/Ammonia Mixtures on Thermal Chemical Vapor Deposition Rates and Microstructures of Carbon Films
Lai, L.-H., Li, H.-C., Shiue, S.-T., Yang, T.-J., Lin, H.-Y.Volume:
2
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.023304jss
Date:
February, 2013
File:
PDF, 1.75 MB
english, 2013