Anisotropic etching of silicon crystals in KOH solution

Anisotropic etching of silicon crystals in KOH solution

C. R. Tellier, A. Brahim-Bounab
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Volume:
29
Language:
english
Pages:
25
DOI:
10.1007/bf00353993
Date:
December, 1994
File:
PDF, 1.88 MB
english, 1994
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