Pulsed laser deposition of silicon nitride thin films by laser ablation of a Si target in low pressure ammonia
I. N. Mihailescu, Adriana Lita, V. S. Teodorescu, A. Luches, M. Martino, A. Perrone, Maria GartnerVolume:
31
Language:
english
Pages:
9
DOI:
10.1007/bf00355991
Date:
June, 1996
File:
PDF, 1.29 MB
english, 1996