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Atmospheric Pressure Radio-Frequency DBD Deposition of Dense Silicon Dioxide Thin Film
Bazinette, Rémy, Paillol, Jean, Lelièvre, Jean-François, Massines, FrançoiseLanguage:
english
Journal:
Plasma Processes and Polymers
DOI:
10.1002/ppap.201600038
Date:
July, 2016
File:
PDF, 1.01 MB
english, 2016