Atmospheric Pressure Radio-Frequency DBD Deposition of...

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Atmospheric Pressure Radio-Frequency DBD Deposition of Dense Silicon Dioxide Thin Film

Bazinette, Rémy, Paillol, Jean, Lelièvre, Jean-François, Massines, Françoise
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Language:
english
Journal:
Plasma Processes and Polymers
DOI:
10.1002/ppap.201600038
Date:
July, 2016
File:
PDF, 1.01 MB
english, 2016
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