Design of a MEMS-based motion stage based on a lever mechanism for generating large displacements and forces
Kim, Yong-Sik, Shi, Hongliang, Dagalakis, Nicholas G, Gupta, Satyandra KVolume:
26
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/26/9/095008
Date:
September, 2016
File:
PDF, 2.52 MB
english, 2016