Arrayed SU-8 polymer thermal actuators with inherent...

Journal of Micromechanics and Microengineering 2016 / 09 Vol. 26; Iss. 9

Arrayed SU-8 polymer thermal actuators with inherent real-time feedback for actively modifying MEMS’ substrate warpage

Wang, Xinghua, Xiao, Dingbang, Chen, Zhihua, Wu, Xuezhong
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Volume:
26
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/26/9/095011
Date:
September, 2016
File:
PDF, 2.92 MB
english, 2016
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