SPIE Proceedings [SPIE Asia Pacific Symposium on Microelectronics and MEMS - Gold Coast, Australia (Wednesday 27 October 1999)] Device and Process Technologies for MEMS and Microelectronics - Fabrication of an uncooled infrared sensor using pyroelectric thin film
Park, Yun-Kwon, Ju, Byeong-Kwon, Park, Heung-Woo, Yoon, Young-Soo, Yom, Sang S., Oh, Young-Jei, Park, Jung-Ho, Suh, Sang-Hee, Oh, Myung-Hwan, Kim, Chul-Ju, Chau, Kevin H., Dimitrijev, SimaVolume:
3892
Year:
1999
Language:
english
DOI:
10.1117/12.364503
File:
PDF, 1.53 MB
english, 1999