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SPIE Proceedings [SPIE First International Symposium on Laser Precision Microfabrication (LPM2000) - Omiya, Saitama, Japan (Wednesday 14 June 2000)] First International Symposium on Laser Precision Microfabrication - F2 laser ablation of GaN
Akane, Toshimitsu, Sugioka, Koji, Nomura, Shintaro, Hammura, Kiyotaka, Obata, Kotaro, Aoki, Naoko, Toyoda, Koichi, Aoyagi, Yoshinobu, Midorikawa, Katsumi, Miyamoto, Isamu, Sugioka, Koji, Sigmon, ThomaVolume:
4088
Year:
2000
Language:
english
DOI:
10.1117/12.405691
File:
PDF, 583 KB
english, 2000