SPIE Proceedings [SPIE Symposium Optika '84 - Budapest, Hungary (Tuesday 24 April 1984)] Symposium Optika '84 - Laser Interferometer Measurement Systems For Machine Tool Industry And Microelectronics
Petru, F., Popela, B., Stejskal, A., Krsek, J., Lupkovics, Gabor, Podmaniczky, AndrasVolume:
473
Year:
1985
Language:
english
DOI:
10.1117/12.942411
File:
PDF, 6.28 MB
english, 1985