SPIE Proceedings [SPIE Micro - DL Tentative - San Jose, CA...

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SPIE Proceedings [SPIE Micro - DL Tentative - San Jose, CA (Sunday 1 March 1992)] Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing II - Production of x-ray mask blanks for a point source stepper

Trimble, Lee E., Celler, George K., Frackoviak, John, Liddle, James A., Weber, Gary R., Peckerar, Martin C.
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Volume:
1671
Year:
1992
Language:
english
DOI:
10.1117/12.136016
File:
PDF, 370 KB
english, 1992
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