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SPIE Proceedings [SPIE Microelectronic Processing '92 - San Jose, CA (Sunday 20 September 1992)] Advanced Techniques for Integrated Circuit Processing II - Profiles and chemistry effects in polysilicon and tungsten silicide EPROM "stack" etching
Flamm, Daniel L., Sadjadi, Reza M., Perry, Jeff R., Bondur, James A., Castleman, Gary, Harriott, Lloyd R., Turner, Terry R.Volume:
1803
Year:
1993
Language:
english
DOI:
10.1117/12.142922
File:
PDF, 713 KB
english, 1993