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SPIE Proceedings [SPIE SPIE'S 1993 Symposium on Microlithography - San Jose, CA (Sunday 28 February 1993)] Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing III - Image formation in capillary arrays: the Kumakhov lens
Chen, Guan-Jye, Cole III, Richard K., Cerrina, Franco, Patterson, David O.Volume:
1924
Year:
1993
Language:
english
DOI:
10.1117/12.146518
File:
PDF, 328 KB
english, 1993