SPIE Proceedings [SPIE Microelectronic Processing '93 - Monterey, CA (Sunday 26 September 1993)] Multilevel Interconnection: Issues That Impact Competitiveness - Reactively sputtered coherent TiN process for sub-0.5-μm technology
Dixit, Girish A., Wright, Peter J., Poarch, Scott, Havemann, Robert H., Ngan, Ken, Nulman, Jaim, Kieu, H., Tepman, A., Hoang, Hoang H., Schutz, Ron, Bernstein, Joseph B., Vasquez, BarbaraVolume:
2090
Year:
1993
Language:
english
DOI:
10.1117/12.156523
File:
PDF, 340 KB
english, 1993