SPIE Proceedings [SPIE SPIE's 1994 Symposium on...

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SPIE Proceedings [SPIE SPIE's 1994 Symposium on Microlithography - San Jose, CA (Sunday 27 February 1994)] Integrated Circuit Metrology, Inspection, and Process Control VIII - 0.35-micron DUV lithography for poly gate layer

Farrar, Nigel R., Singh, Bhanwar, Bennett, Marylyn H.
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Volume:
2196
Year:
1994
Language:
english
DOI:
10.1117/12.174135
File:
PDF, 513 KB
english, 1994
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