![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Tuesday 18 October 1994)] Microelectronics Technology and Process Integration - Analysis and modeling of submicron drain-offset polysilicon thin film transistors (TFTs)
Damiano, Jr., John, Jung, Le-Tien, Banerjee, Sanjay K., Batra, S., Manning, M., Dennison, C., Chen, Fusen E., Murarka, Shyam P.Volume:
2335
Year:
1994
Language:
english
DOI:
10.1117/12.186060
File:
PDF, 425 KB
english, 1994