SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, USA (Saturday 2 February 2013)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII - Fresnel attenuator of laser radiation power
Owsik, Jan, Avdeev, Yury, Liberman, Anatoly A., Kovalev, Alexander A., Mikryukov, Alexey S., Moskalyuk, Sergey A., Noga, Janusz, Rembielińska, Anna, Walczuk, Joanna, Xu, Xianfan, Hennig, Guido, NakataVolume:
8607
Year:
2013
Language:
english
DOI:
10.1117/12.2001697
File:
PDF, 662 KB
english, 2013