SPIE Proceedings [SPIE SPIE Microtechnologies - Grenoble, France (Wednesday 24 April 2013)] Smart Sensors, Actuators, and MEMS VI - Thermal design of a tristable electromagnetic linear microactuator with high displacement and low actuation force for mass storage applications
Xu, X., Ngo, H.-D., Mackowiak, P., Obermeier, E., Miletic, D., Gerdes, H., Gatzen, H.-H., Schmid, Ulrich, Sánchez de Rojas Aldavero, José Luis, Leester-Schaedel, MonikaVolume:
8763
Year:
2013
Language:
english
DOI:
10.1117/12.2017559
File:
PDF, 652 KB
english, 2013