SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 17 August 2014)] Advances in Metrology for X-Ray and EUV Optics V - Upgrade of surface profiler for x-ray mirror at SPring-8
Assoufid, Lahsen, Ohashi, Haruhiko, Asundi, Anand K., Senba, Y., Kishimoto, H., Miura, T., Ohashi, H.Volume:
9206
Year:
2014
Language:
english
DOI:
10.1117/12.2063356
File:
PDF, 1.37 MB
english, 2014