SPIE Proceedings [SPIE Orlando '90, 16-20 April - Orlando, FL (Monday 16 April 1990)] Applications of Artificial Intelligence VIII - Application of machine learning techniques to semiconductor manufacturing
Irani, Keki B., Cheng, Jie, Fayyad, Usama M., Qian, Zhaogang, Trivedi, Mohan M.Volume:
1293
Year:
1990
Language:
english
DOI:
10.1117/12.21147
File:
PDF, 542 KB
english, 1990