SPIE Proceedings [SPIE Microelectronic Manufacturing '95 - Austin, TX (Wednesday 25 October 1995)] Process, Equipment, and Materials Control in Integrated Circuit Manufacturing - Elimination of monitor wafers in metal film process control
Johnson, Sr., Walter H., Hobbs, Dan, Jones, Ron, Pors, Gary, Sabnis, Anant G., Raaijmakers, Ivo J.Volume:
2637
Year:
1995
Language:
english
DOI:
10.1117/12.221325
File:
PDF, 153 KB
english, 1995