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SPIE Proceedings [SPIE Micromachining and Microfabrication '96 - Austin, TX (Monday 14 October 1996)] Microelectronic Structures and MEMS for Optical Processing II - Bonding techniques for single crystal TFT AMLCDs
van der Groen, Sonja, Rosmeulen, Maarten, Jansen, Philippe, Deferm, Ludo, Baert, Christiaan, Motamedi, M. Edward, Bailey, WayneVolume:
2881
Year:
1996
Language:
english
DOI:
10.1117/12.251250
File:
PDF, 448 KB
english, 1996