SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Rapid Thermal and Related Processing Techniques - Multiple photo-assisted CVD of thin-film materials for III-V device technology
Nissim, Yves I., Moison, Jean M., Houzay, Francoise, Lebland, F., Licoppe, C., Bensoussan, M., Singh, Rajendra, Moslehi, Mehrdad M.Volume:
1393
Year:
1991
Language:
english
DOI:
10.1117/12.25707
File:
PDF, 678 KB
english, 1991