SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 29 September 1997)] Micromachining and Microfabrication Process Technology III - Microfabrication technologies for microsystems
de Rooij, Nico F., Chang, Shih-Chia, Pang, Stella W.Volume:
3223
Year:
1997
Language:
english
DOI:
10.1117/12.284466
File:
PDF, 2.07 MB
english, 1997