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SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Wednesday 1 October 1997)] Microelectronic Manufacturing Yield, Reliability, and Failure Analysis III - Effect of cycle time and fab yield variation on the number of wafer outs variability: a Monte Carlo case study
Ortega, Carlos, Bonal, Javier, Collado, Javier C., Keshavarzi, Ali, Prasad, Sharad, Hartmann, Hans-DieterVolume:
3216
Year:
1997
Language:
english
DOI:
10.1117/12.284689
File:
PDF, 183 KB
english, 1997