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SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Sunday 20 September 1998)] Micromachining and Microfabrication Process Technology IV - Silicon surface micromachining by anhydrous HF gas-phase etching with methanol
Jang, Won-Ick, Choi, Chang-Auck, Lee, Chang S., Hong, Yoonshik, Lee, Jong-Hyun, Baek, Jong T., Kim, Bo Woo, Smith, James H.Volume:
3511
Year:
1998
Language:
english
DOI:
10.1117/12.324292
File:
PDF, 3.82 MB
english, 1998