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SPIE Proceedings [SPIE 18th Annual BACUS Symposium on Photomask Technology and Management - Redwood City, CA (Wednesday 16 September 1998)] 18th Annual BACUS Symposium on Photomask Technology and Management - Characterization of OPC masks for thin-film head pole trimming applications
Flack, Warren W., White, Sylvia, Ho, Calvin, Schurz, Dan L., Consentino, Fabio, Grenon, Brian J., Abboud, Frank E.Volume:
3546
Year:
1998
Language:
english
DOI:
10.1117/12.332846
File:
PDF, 3.03 MB
english, 1998