SPIE Proceedings [SPIE 18th Annual BACUS Symposium on Photomask Technology and Management - Redwood City, CA (Wednesday 16 September 1998)] 18th Annual BACUS Symposium on Photomask Technology and Management - CD guarantee for the next-generation photomasks with CD-SEM
Iwamatsu, Takayuki, Hiruta, Koji, Morimoto, Hiroaki, Ataka, Masashi, Nitta, Jun, Grenon, Brian J., Abboud, Frank E.Volume:
3546
Year:
1998
Language:
english
DOI:
10.1117/12.332868
File:
PDF, 1.44 MB
english, 1998