SPIE Proceedings [SPIE Microelectronic Manufacturing '99 -...

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SPIE Proceedings [SPIE Microelectronic Manufacturing '99 - Santa Clara, CA (Wednesday 22 September 1999)] Microelectronic Device Technology III - Impact of active dimension on junction leakages of a Ti-salicide process integrated with shallow-trench isolation

Siah, Soh Yun, Lim, Eng-Hua, Shiu, Ming-Jr, Lee, Kong H., Zheng, Jia Z., Burnett, David, Tsuchiya, Toshiaki
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Volume:
3881
Year:
1999
Language:
english
DOI:
10.1117/12.360566
File:
PDF, 1.66 MB
english, 1999
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