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SPIE Proceedings [SPIE Symposium on Micromachining and Microfabrication - Santa Clara, CA (Monday 20 September 1999)] Micromachining and Microfabrication Process Technology V - Evidence of dislocations for the control of roughness of highly thermal boron-doped diffused silicon layers
Manea, Elena, Divan, Ralu, Cernica, Ileana, Smith, James H., Karam, Jean MichelVolume:
3874
Year:
1999
Language:
english
DOI:
10.1117/12.361244
File:
PDF, 1.49 MB
english, 1999