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SPIE Proceedings [SPIE First International Symposium on Laser Precision Microfabrication (LPM2000) - Omiya, Saitama, Japan (Wednesday 14 June 2000)] First International Symposium on Laser Precision Microfabrication - Laser precision microfabrication in Japan
Miyamoto, Isamu, Ooie, Toshihiko, Takeno, Shozui, Miyamoto, Isamu, Sugioka, Koji, Sigmon, Thomas W.Volume:
4088
Year:
2000
Language:
english
DOI:
10.1117/12.405676
File:
PDF, 4.18 MB
english, 2000