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SPIE Proceedings [SPIE Intelligent Systems and Smart Manufacturing - Boston, MA (Sunday 5 November 2000)] Optomechanical Engineering 2000 - New models for optical MEMS
Kurzweg, Timothy P., Martinez, Jose A., Levitan, Steven P., Marchand, Philippe J., Chiarulli, Donald M., Kahan, Mark A.Volume:
4198
Year:
2001
Language:
english
DOI:
10.1117/12.417353
File:
PDF, 343 KB
english, 2001