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SPIE Proceedings [SPIE Photonics West 2001 - LASE - San Jose, CA (Saturday 20 January 2001)] Laser Applications in Microelectronic and Optoelectronic Manufacturing VI - ITO thin film fabrication assisted by the infrared free-electron laser
Yasumoto, Masato, Ishizu, Akira, Tsubouchi, Natsuro, Awazu, Kunio, Tomimasu, Takio, Gower, Malcolm C., Helvajian, Henry, Sugioka, Koji, Dubowski, Jan J.Volume:
4274
Year:
2001
Language:
english
DOI:
10.1117/12.432544
File:
PDF, 84 KB
english, 2001