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SPIE Proceedings [SPIE International Symposium on Microelectronics and MEMS - Adelaide, Australia (Monday 17 December 2001)] Device and Process Technologies for MEMS and Microelectronics II - Single-crystal silicon nanostructure fabrication by scanning probe lithography and anisotropic wet etching
Chang, Kow-Ming, You, Kai-Shyang, Wu, Chia H., Sheu, Jeng Tzong, Chiao, Jung-Chih, Faraone, Lorenzo, Harrison, H. Barry, Shkel, Andrei M.Volume:
4592
Year:
2001
Language:
english
DOI:
10.1117/12.448972
File:
PDF, 386 KB
english, 2001