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SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 29 July 2001)] Wave-Optical Systems Engineering - Proximity printing by wave-optically designed masks

Wyrowski, Frank, Kley, Ernst-Bernhard, Buehling, Sven, Nellissen, Ton J., Wang, Lingli, Dirkzwager, Maarten, Wyrowski, Frank
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Volume:
4436
Year:
2001
Language:
english
DOI:
10.1117/12.451293
File:
PDF, 462 KB
english, 2001
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