SPIE Proceedings [SPIE Workshop on Nanostructure Science, Metrology, and Technology - Gaithersburg, MD (Wednesday 5 September 2001)] Nanostructure Science, Metrology, and Technology - Facilities for fabricating nanostructures
Marrian, Christie R., Peckerar, Martin C., Postek, Jr., Michael T.Volume:
4608
Year:
2002
Language:
english
DOI:
10.1117/12.465456
File:
PDF, 27 KB
english, 2002