SPIE Proceedings [SPIE Photonics Fabrication Europe - Brugge, Belgium (Monday 28 October 2002)] Laser Micromachining for Optoelectronic Device Fabrication - F2-laser microfabrication of sub-μm gratings in fused silica
Ihlemann, Juergen, Mueller, Sabine, Puschmann, Stefan, Schaefer, Dirk, Herman, Peter R., Li, Jianzhao, Wei, Midori X., Ostendorf, AndreasVolume:
4941
Year:
2003
Language:
english
DOI:
10.1117/12.468237
File:
PDF, 368 KB
english, 2003