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SPIE Proceedings [SPIE Photonics Fabrication Europe -...

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SPIE Proceedings [SPIE Photonics Fabrication Europe - Brugge, Belgium (Monday 28 October 2002)] Laser Micromachining for Optoelectronic Device Fabrication - F2-laser microfabrication of sub-μm gratings in fused silica

Ihlemann, Juergen, Mueller, Sabine, Puschmann, Stefan, Schaefer, Dirk, Herman, Peter R., Li, Jianzhao, Wei, Midori X., Ostendorf, Andreas
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Volume:
4941
Year:
2003
Language:
english
DOI:
10.1117/12.468237
File:
PDF, 368 KB
english, 2003
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