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SPIE Proceedings [SPIE Photonics Fabrication Europe - Brugge, Belgium (Monday 28 October 2002)] MEMS/MOEMS: Advances in Photonic Communications, Sensing, Metrology, Packaging and Assembly - Gripping tool for MEMS Assembly with an absolute distance measurement sensor using a fibre optic WL interferometer with high measuring frequency
Pfeifer, Tilo, Aleriano, Ubaldo, Depiereux, Frank, Behringer, Uwe F. W., Courtois, Bernard, Khounsary, Ali M., Uttamchandani, Deepak G.Volume:
4945
Year:
2003
Language:
english
DOI:
10.1117/12.468417
File:
PDF, 528 KB
english, 2003