SPIE Proceedings [SPIE Photonics Fabrication Europe -...

  • Main
  • SPIE Proceedings [SPIE Photonics...

SPIE Proceedings [SPIE Photonics Fabrication Europe - Brugge, Belgium (Monday 28 October 2002)] MEMS/MOEMS: Advances in Photonic Communications, Sensing, Metrology, Packaging and Assembly - Gripping tool for MEMS Assembly with an absolute distance measurement sensor using a fibre optic WL interferometer with high measuring frequency

Pfeifer, Tilo, Aleriano, Ubaldo, Depiereux, Frank, Behringer, Uwe F. W., Courtois, Bernard, Khounsary, Ali M., Uttamchandani, Deepak G.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
4945
Year:
2003
Language:
english
DOI:
10.1117/12.468417
File:
PDF, 528 KB
english, 2003
Conversion to is in progress
Conversion to is failed