SPIE Proceedings [SPIE International Symposium on High-Power Laser Ablation 2002 - Taos, NM (Monday 22 April 2002)] High-Power Laser Ablation IV - Laser microprocessing in microelectronics, data storage, and photonics
Lu, Yongfeng, Song, Wen D., Ren, ZhongMin, An, Chengwu, Liu, DaMing, Huang, Sumei, Wang, Weijie, Hong, Ming Hui, Chong, Tow Chong, Cho, B. J., Zeng, JiNan, Tan, C. F., Phipps, Claude R.Volume:
4760
Year:
2002
Language:
english
DOI:
10.1117/12.482088
File:
PDF, 898 KB
english, 2002