SPIE Proceedings [SPIE Microlithography 2003 - Santa Clara, CA (Sunday 23 February 2003)] Emerging Lithographic Technologies VII - Measuring and tailoring CTE within ULE glass
Engelstad, Roxann L., Hrdina, Kenneth E., Ackerman, Bradford G., Fanning, Andrew W., Heckle, Christine E., Jenne, David C., Navan, W. D.Volume:
5037
Year:
2003
Language:
english
DOI:
10.1117/12.484925
File:
PDF, 330 KB
english, 2003