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SPIE Proceedings [SPIE Advanced Microelectronic Manufacturing - Santa Clara, CA (Sunday 23 February 2003)] Process and Materials Characterization and Diagnostics in IC Manufacturing - Sidewall structure estimation from CD-SEM for lithographic process control
Bingham, Philip R., Tobin, Jr., Kenneth W., Emami, Iraj, Price, Jeffery R., Tobin, Jr., Kenneth W., Karnowski, Thomas P., Bennett, Marylyn H., Bogardus, E. Hal, Bishop, MichaelVolume:
5041
Year:
2003
Language:
english
DOI:
10.1117/12.485229
File:
PDF, 490 KB
english, 2003