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SPIE Proceedings [SPIE Microtechnologies for the New Millennium 2003 - Maspalomas, Gran Canaria, Canary Islands, Spain (Monday 19 May 2003)] Smart Sensors, Actuators, and MEMS - Design and fabrication of a three-dimensional long-stretch micro drive by electroplating
Wu, Chien-Tai, Chiao, Jung-Chih, Varadan, Vijay K., Tai, Wen-Chuan, Hsu, Chen-Peng, Can, Carles, Hsu, WensyangVolume:
5116
Year:
2003
Language:
english
DOI:
10.1117/12.498920
File:
PDF, 434 KB
english, 2003