SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, California, USA (Sunday 3 August 2003)] Laser-Generated and Other Laboratory X-Ray and EUV Sources, Optics, and Applications - Design of high-average-power clean EUV light source based on laser-produced Xenon plasma
Endo, Akira, Kyrala, George A., Gauthier, Jean-Claude J., Abe, Tamotsu, Suganuma, Takashi, MacDonald, Carolyn A., Khounsary, Ali M., Imai, Yousuke, Someya, Hiroshi, Hoshino, Hideo, Masaki, Nakano, SouVolume:
5196
Year:
2003
Language:
english
DOI:
10.1117/12.503434
File:
PDF, 165 KB
english, 2003