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SPIE Proceedings [SPIE San Diego, '91, San Diego, CA - San Diego, CA (Sunday 21 July 1991)] Optical Scatter: Applications, Measurement, and Theory - Description and calibration of a fully automated infrared scatterometer
Mainguy, Stephane, Olivier, Michel, Josse, Michel A., Guidon, Michel, Stover, John C.Volume:
1530
Year:
1991
Language:
english
DOI:
10.1117/12.50517
File:
PDF, 411 KB
english, 1991